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Electronic and vibrational properties of interstitial clusters in degenerately boron-doped silicon [dataset] Open Access

Degenerate boron-doped silicon is prone to interstitial clustering, which adversely impacts key electrical properties, such as carrier concentration and mobility. Clustering becomes increasingly important with device miniaturisation, due to the high boron concentrations involved. Here we use vibrational and Compton electron energy loss spectroscopy (EELS) in a (scanning) transmission electron microscope to measure changes in the vibrational and electronic properties of the silicon host lattice due to degenerate boron doping (1020 cm−3 hole concentration). A broad phonon defect band centred at 1064 cm−1 wavenumber was detected. Subtle changes in bonding anisotropy due to boron doping along [110] and [100] directions were also observed. Density functional theory (DFT) modelling showed that boron acceptors had very little effect on the phonon and bonding properties. Instead boron interstitial clusters two to three atoms in size produced changes that agreed more closely with experiment. The results suggest the potential of using high spatial resolution EELS for the detection of clustering phenomena at the device level.

Descriptions

Resource type

Dataset

Contributors

Creator: Mendis, Budhika Gehan ¹
Dhamotharan, Kaviyadharshini ¹

¹ Durham University

Funder

Engineering and Physical Sciences Research Council
Government of India

Research methods

Other description

Keyword

Vibrational electron energy loss spectroscopy
Electron Compton scattering
Phonon defect modes
Bonding anisotropy
Degenerate boron-doped silicon

Subject

Electrons, Compton
Phonons--Scattering
Anisotropy
Boron--Spectra

Location

Language

Cited in

Identifier

ark:/32150/r1mw22v5500
doi:10.15128/r1mw22v5500

Rights

Creative Commons Attribution 4.0 International (CC BY)

Publisher

Durham University

Date Created

File Details

Depositor

B.G. Mendis

Date Uploaded

12 May 2025, 13:05:45

Date Modified

13 May 2025, 14:05:03

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File format: zip (ZIP Format)

Mime type: application/zip

File size: 244708

Last modified: 2025:05:12 14:04:06+01:00

Filename: Raw data files.zip

Original checksum: 8d0c05222168c004374692040e91bc5f