Software version:ATTOLIGHT SE-CL Server 38.45e  (SMARPOD)
Timestamp:2022-12-07 17:35:00:028
_WAFER
Lot Number:LOT_0000
ID:WAFER_0000
Type:ROUNDWITHFLAT
Center Position X:0.000000 mm
Center Position Y:0.000000 mm
Orientation:0.000000 deg
Diameter:0 mm
Flat Length:0.000000 mm
Edge Exclusion:0.000000 mm
_SITE IMAGE
Reference Field of view:23.466 um
Number of pixels (x axis):128 px
Number of pixels (y axis):128 px
Dwell Time:500000.000000 us
stage_model:10010
stage_position_x:-4.765651
stage_position_y:-4.267729
stage_position_z:0.119398
stage_rotation_x:0.0000
stage_rotation_y:0.0000
stage_rotation_z:0.0000
_SEM
Beam Energy:8002.22 V
Gun Lens:1.347672 A
Objective Lens:0.383972 A
Aperture:100
Blanker:Off
Deflector 1 X:1.12 V
Deflector 1 Y:-33.57 V
Deflector 2 X:-0.01 V
Deflector 2 Y:-0.01 V
Astigmatism 1 X:-0.01 V
Astigmatism 1 Y:0.00 V
Astigmatism 2 X:66.33 V
Astigmatism 2 Y:-23.98 V
Isolation Valve:Opened
Emission Status:ON
Scintillator Voltage:6007.00 V
Beam Current:13.80 uA
Emission Current:75.40 uA
Cathode Heating Current:2.25 A
Cathode Heating Voltage:1.82 V
Suppressor Bias:1004.58 V
Extractor Voltage:4943.15 V
Gun Chamber Pressure:1.5001e-10 Torr
Aperture Chamber Pressure:5.2504e-08 Torr
Attomic zoom:24
Attomic ReadedMagnification:3490.000000
Real Magnification:5585.548340
Reference Screen Size:131.072000 mm
Reference Field of view:23.466 um
_CHANNELS
Channel1:SE
Channel2:CCD
_CCD
Camera Model:A.920
Horizontal Binning:1
Temperature:-69 °C
Signal Amplification:x4
Baseline Clamp:Off
Readout Rate (horizontal pixel shift):50Khz
Speed (vertical pixel shift):1.700000
Voltage Amplitude (vertical pixel shift):normal
ReadMode:FVB
Exposure Time:000.500000 s
Capture Depth:1024
Pixel Width: 0.02600 mm
_SPECTROMETER
Turret:IHR 320
Turret id:0
Grating:150/500
Grating - Groove Density:150 gr/mm
Grating - Blaze Angle:0
Central wavelength:850.01 nm
Entrance slit width:700 um
Exit slit width:0 um
Exit spectral resolution:0 nm
Exit mirror position:lateral
central shift:9.500 nm
Spectrometer Focal Length:319.76001 mm
Camera Tilt Angle:2.890000 deg
Ebert Angle:-9.800000 deg
Filter:None
_SCAN
Mode:HYP
HYP Dwelltime:500.000000 ms
Resolution_X:128 pixels
Resolution_Y:128 pixels
Reference_Size_X:512
Reference_Size_Y:512
Voltage Calibration Range_X:9.200000 V
Voltage Calibration Range_Y:9.200000 V
Start_X:0
Size_X:1024
Start_Y:0
Size_Y:1024
Rotate:0.000000 deg
InitialRotate:0.000000 deg
